露光装置:EXP-2700
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For high precision solder resist

 

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Panel size (standard or large)

Light source type (scattered light or collimated light)

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Improved positioning accuracy
    • Compared with the conventional machine (EXP-2001B), the positioning accuracy between panel and mask has been greatly improved.
Adoption of high-power lamp
    • The use of newly developed high-power lamp has made it possible to significantly shorten exposure time.
Simplified setup
    • The same mechanism as our latest models, such as lightweight exposure frame glass and recipe for setup information, has been adopted to reduce setup time.
Large-size panel (E type)
    • In response to industry needs, we have released a new type that can accommodate large panel up to 28.5" x 24.5".
Collimated light source type
  • A Collimated light source type has been released to meet the demand for higher resolution. High intensity short-arc UV lamps are used to improve productivity.
 
Video

Video

Repeat product videos for related systems

movie-exp
Product specification

Product specification

Model Type EXP-2700S EXP-2700P EXP-2700E EXP-2700PE
Panel Size (G)25"x21" ~ 13"x11.8"
(W)26"x22" ~ 13"x11.8"
28.5"x24.5" ~ 15.7"x13"
Panel Thickness 0.04 mm to 2.4 mm (option: ~3.2 mm)
Positioning Accuracy ±3 μm (repeatability)
Cycle Time 9.5 sec (including 2 sec vacuum waiting time) + exposure time 10.5 sec (including 2 sec vacuum waiting time) + exposure time
Optical system Scattered light Collimated light Scattered light Collimated light
Light source Metal halide UV lamps 12kWx2 Short arc UV lamps 8kWx2 Metal halide UV lamps 12kWx2 Short arc UV lamps 10kWx2
Intensity uniformity (G) 620 x 520mm : 85% (G) 610 x 510mm : 94% 710 × 610mm
(W) 645 x 545mm : 80% (W) 620 x 520mm : 94% 85% 90%
Initial intensity (max) 105 mW/c㎡ (G) 80 mW/c㎡
(W) 65 mW/c㎡
95 mW/c㎡ 76 mW/c㎡
Exposure method Vacuum contact method
Transport method Blower + suction plate
Temperature and humidity controller Standard equipment
External dimensions (main unit) 4704(W) × 2235(D) × 2231(H)mm 4704(W) × 2745(D) × 2495(H)mm 5184(W) × 2370(D) × 2231(H)mm 5184(W) × 3177(D) × 2495(H)mm
  Optional support
Automatic mask
Cleaning mechanism
Built-in clean roller
Transport method End-face suction pad method
Mask Type Compatible with glass masks

 

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