For high resolution patterns
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New LED light source type.New lineup of UV-LED light source type with parallel light. Contributes to energy savings. |
For large-size panel High intensity lamp. |
Improved positioning accuracy
Cleanliness
Reduced running costs
Large-size panel support (E type)
LED Light Source
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Product specification
Product specification
Model type | EXP-2500 | EXP-2500-LED | EXP-2500E | EXP-2500E-LED |
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Panel Size | (G)25" x 21" ~ 13" x 11.8" (W)26" x 22" ~ 13" x 11.8" |
28.5" x 24.5" ~ 15.7" x 13" | ||
Panel Thickness | 0.04 mm to 2.4 mm (option: ~3.2 mm) | |||
Positioning Accuracy | ±3 μm (repeatability) | |||
Cycle Time | 9.5 sec (including 2 sec vacuum waiting time) + exposure time | 10.5 sec (including 2 sec vacuum waiting time) + exposure time | ||
Light Source | Short arc UV lamp 5kW x1 | UV-LED unit x2 | Short arc UV lamp 5kW x1 | UV-LED unit x2 |
Intensity uniformity | (G)620 x 520 mm : 90% | 710 x 610 mm | ||
(W)650 x 550 mm : 85% | 90% | 85% | ||
Initial intensity (max) | 30 mW/c㎡ | 27 mW/c㎡ | ||
Exposure method | Vacuum contact method | |||
Transport Method | End-face suction pad type transfer | |||
Temperature and humidity controller | Standard equipment | |||
Built-in clean roller | Automatic mask/stage cleaning mechanism as standard equipment | |||
Dimensions (main unit) | 5014(W) × 2530(D) × 2400(H) mm | 5494(W) × 2665(D) × 2440(H) mm | ||
Optional support | ||||
Post-reverse cleaning | Dedicated intermediate clean roller (inverted section) | |||
Transport method | Blower + suction plate | |||
Mask type | Compatible with glass masks | |||
Camera illumination | Reflective Illumination |