露光装置:EXP-2500
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For high resolution patterns

 

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New LED light source type.

New lineup of UV-LED light source type with parallel light. Contributes to energy savings.

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For large-size panel

High intensity lamp.

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Improved positioning accuracy
      • Compared with the conventional system (EXP-2050), the positioning accuracy between panel and mask has been greatly improved.
Cleanliness
      • A mask cleaning mechanism is standard, and together with the hepa filter, reduces product defects caused by foreign matter. An intermediate clean roller can also be installed between the upper and lower streams. (Option)
Reduced running costs
      • The use of a single lamp with high intensity and long life enables a significant reduction in running costs to less than 1/2 of those of conventional models.
Large-size panel support (E type)
      • In response to industry needs, we have released a new type that can handle large panel size up to 28.5" x 24.5".
LED Light Source
    • LED light source (collimated light optical system) type is newly added to the lineup. This contributes to further energy saving.
 
Video

Video

Repeat product videos for related systems

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Product specification

Product specification

Model type EXP-2500 EXP-2500-LED EXP-2500E EXP-2500E-LED
Panel Size (G)25" x 21" ~ 13" x 11.8"
(W)26" x 22" ~ 13" x 11.8"
28.5" x 24.5" ~ 15.7" x 13"
Panel Thickness 0.04 mm to 2.4 mm (option: ~3.2 mm)
Positioning Accuracy ±3 μm (repeatability)
Cycle Time 9.5 sec (including 2 sec vacuum waiting time) + exposure time 10.5 sec (including 2 sec vacuum waiting time) + exposure time
Light Source Short arc UV lamp 5kW x1 UV-LED unit x2 Short arc UV lamp 5kW x1 UV-LED unit x2
Intensity uniformity (G)620 x 520 mm : 90% 710 x 610 mm
(W)650 x 550 mm : 85% 90% 85%
Initial intensity (max) 30 mW/c㎡ 27 mW/c㎡
Exposure method Vacuum contact method
Transport Method End-face suction pad type transfer
Temperature and humidity controller Standard equipment
Built-in clean roller Automatic mask/stage cleaning mechanism as standard equipment
Dimensions (main unit) 5014(W) × 2530(D) × 2400(H) mm 5494(W) × 2665(D) × 2440(H) mm
  Optional support
Post-reverse cleaning Dedicated intermediate clean roller (inverted section)
Transport method Blower + suction plate
Mask type Compatible with glass masks
Camera illumination Reflective Illumination

 

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