For high-end Panel

Large panel size: up to 660 x 558 mm

Equipped with high-intensity lamp: 25% shorter exposure time

HEPA filter and mask film/exposure stage cleaning mechanism are standard

High Productivity

• ORC's proprietary 8kW short-arc UV lamp achieves an initial intensity of 85mW/c㎡. Exposure time has been reduced by 25% compared to our conventional models.

Cleanliness (Class 100)

• HEPA filters are installed in the transport mechanism and exposure chamber. Optimized downflow eliminates microscopic particles. In addition, a newly developed cleaning mechanism removes foreign matter from the mask film and exposure stage.

High resolution

• ORC's optical technology accumulated over many years enables high resolution of 12μm L/S for dry film and 50μm solder resist opening.

High-precision alignment system (alignment repeatability ±3μm)

• ORC's proprietary high-performance lens and illumination system for alignment camera are used. High positioning accuracy can be obtained by improving mark recognition accuracy.

Partition exposure function

• Alignment and exposure can be performed in 2, 3, 4, or 6 partitions according to the required accuracy of the product. Alignment in each partition area improves overlay accuracy.