Semiconductor Exposure System

  • 露光装置：PPS-8200/8300
    PPS-8200p1/8300p1

    For wafer-level packages
    High-precision, high-productivity stepper

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  • 露光装置：PPS-8500
    PPS-8500

    For panel-level packages
    High-precision, high-productivity stepper

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半導体用UV照射装置

  • UV照射装置：VUM-3500
    VUM-3500

    In semiconductor processes
    Removal charge and Data Erase

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