露光装置 PPS-8500 - 株式会社　オーク製作所　-ORC MANUFACTURING CO.,LTD.-

Highly warped substrates due to heat treatment and distorted rewiring surfaces.
Optimal suction method for warped panel.
Auto focus function with multi-point focus.
Alignment function for panel expansion and contraction.
Split global alignment, Shot by Shot (Die by Die) alignment, and scaling by reticle.

Repeat product videos for related systems

Model type	PPS-8500
Panel Size	510 x 515mm(Max)
Resolution	2.0 µmL/S (2.0 µm resist thickness)
NA (numerical aperture)	0.16, 0.1 variable
Reduction ratio	1:1
Field Size	52mm × 33mm
Exposure wavelength	ghi-line gh-line i-line (recipe linked)
Reticle Size	6inch
Total Overlay Accuracy	≦1.0 µm(\|Ave\|+3σ)
System Size/Weight	（W）3,000×（D）4,800×（H）2,500mm / 11,000kg

PPS-8200/PPS-8300