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| ■ 2.5D, 3D Package |
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| ■ Various Interposers |
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| ■ WL-CSP/FO-PLP |
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■ Variable Lens NA and 1:1 Dyson Optical System
■ Large Exposure Field : 52x33 mm2
■ User Friendly Reticle Design (max.8 fields)
■ Outgas Protection Unit for Optics
■ Handling System for thin Panel and warped Panel
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| ■ Exposure Wavelength |
ghi-line, gh-line, i-line |
| ■ Resolution |
2 μm L/S (for 2 μm thickness photoresist） |
| ■ Depth of Focus |
≧10μm |
| ■ Initial Intensity |
≧2700mW/cm2 |
| ■ Exposure Uniformity |
≦ 3％ (ghi-lines) |
| ■ Exposure Filed |
52 x 33 mm2 |
| ■ Overlay Accuracy (machine-to-self overlay) |
≦ 1.0μm (|AVE|+3σ) |
| ■ Panel Size |
415 x 510mm2/515 x 510mm2 |
| ■ Dimension / Weight |
4800(D) X 3000(W) X
2500(H) / 11000Kg |
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