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Solder resist formation:
- -FC-BGA substrates/FC-CSP substrates
- -Various module substrates such as AiP
- -HDI substrates
-Exposure of various other sensitive materials
- -Photovia, coverlay, etc.
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- Realizes resist SRO of φ40µm to accommodate miniaturization of package substrates. (EDi-5308)
- New UV lamp light source with greatly improved light intensity achieves up to 10% higher productivity than conventional models. (EDi-8308)
- The broadband wavelength of the UV lamp light source enables the use of a wide range of photo sensitive materials.
- High positional accuracy of 6 µm is achieved with the D-A-T high-precision compensation technology and a new high-precision stage (EDi-5308).
- Die by Die alignment function solves the die shift problem of FO-PLP (optional function)
- Supports large substrates up to 25 "X32" (EDi-8310)
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Repeat product videos for related systems
Exposed sample
Exposed sample
EDi-5308
SRO:Φ40μm
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EDi-8308
SROΦ:80μm
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Product specification
Product specification
| Light source | Resolution | Maximum exposure size | Total Overlay Accuracy |
EDi-5308 |
UV Lamp |
SRO:Φ40μm |
635x535 mm |
6μm |
EDi-8308 |
UV Lamp |
SRO:Φ80μm |
635x535 mm |
7μm |
EDi-8310 |
UV Lamp |
SRO:Φ80μm |
813x635 mm |
7μm |